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掃描式原子力顯微鏡AFM
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easyScan 2 |
模組化配備AFM或STM檢出裝置,可以共用控制計測器。

應用 :半導體製程量測、奈米材料或元件檢測、生物分子。

Nanosurf easyScan 2 Technical Data
| STM measurement | ||||
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STM Scan Head |
500 nm |
1 μm |
500nm LC(low current) |
1μm LC(low current) |
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Maximum Scan range |
500 nm |
1.0 μm |
500 nm |
1.0 μm |
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Maximum Z-range |
200 nm |
200 nm |
200 nm |
200 nm |
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Drive resolution Z |
3 pm |
3 pm |
3 pm |
3 pm |
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AFM measurement |
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AFM Scan Head |
10μm |
70
μm |
110
μm |
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Maximum Scan range |
10μm |
70
μm |
110
μm |
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Maximum Z-range |
2
μm |
14
μm |
22
μm |
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Driver resolution Z |
0.027 nm |
0.21 nm |
0.34 nm |
整合多功能手提式原子力顯微鏡AFM
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Model: Mobile S (All-In-One AFM) |
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應用:半導體製程量測、奈米材料或原件檢測、生物分子。
